N2 Reducer ( 감압 Valve 6Bar -> 2Bar) N2 ReducerN2 ReducerN2 Reducer 내부N2 Reducer ShaftN2 ReducerN2 Reducer Test 진공 Valve Repair/기타 장비 2015.12.11
Servo motor Panasonic MSMA011A1G MSMA011A1G Panasonic Servo Motor MSMA011A1G Servo Motor Repair/Panasonic 2015.12.10
VAT TM VAlVE VAT GATE Valve 공압 controller 내부 Cylinder 및 Bellows Cylinder 상태 확인 Helium detector Leak CheckHelium detector Leak Check구동 Test 진행구동 Test 진행 Vacuum Gate Valve Repair/VAT Gate Valve 2015.12.09
TEL ROBOT 개조 Overhaul TEL ROBOT OVERHAULDRY ETCH TEL ROBOT 개조 반복 TEST 직진도 CHECK 레이저 직진성 TEST 반복 정밀도 CHECK Robot Repair/ETC Robot 2015.12.08
